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Development of the phase composition and the properties of Ti2AlC and Ti3AlC2 MAX-phase thin films – A multilayer approach towards high phase purity

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dc.contributor.author Torres C. es_PE
dc.contributor.author Quispe R. es_PE
dc.contributor.author Calderón N.Z. es_PE
dc.contributor.author Eggert L. es_PE
dc.contributor.author Hopfeld M. es_PE
dc.contributor.author Rojas C. es_PE
dc.contributor.author Camargo M.K. es_PE
dc.contributor.author Bund A. es_PE
dc.contributor.author Schaaf P. es_PE
dc.contributor.author Grieseler R. es_PE
dc.date.accessioned 2024-05-30T23:13:38Z
dc.date.available 2024-05-30T23:13:38Z
dc.date.issued 2021
dc.description.abstract MAX phase thin films have been synthesized by thermal treatment of a Ti-Al-C multilayer system. The preparation of the multilayer system was carried out via magnetron sputtering. Based on the thickness ratio among the individual nanoscale monolayers (Ti, Al, C), the resulting MAX phase stoichiometry can be controlled. This paper describes the synthesis of both Ti2AlC and Ti3AlC2 MAX phases from the same precursor multilayer system which is composed of a sequence of Ti/Al/C pure elemental single layers with thicknesses of 14, 6, and 3.5 nm, respectively. This sequence is repeated 22 times with a total thickness of around 500 nm. Rapid thermal treatment tests were performed to study the phase development. The Ti2AlC MAX phase forms in a temperature range below 850 °C, whereas the Ti3AlC2 MAX phase starts to form at temperatures above 850 °C and reaches its highest phase purity at 950 °C. The thin film structures were studied by X-ray diffraction and Raman spectroscopy. Furthermore, the electrical and mechanical properties were investigated to gain more insights regarding the phase transformation and their influence on the thin film properties. © 2020 Elsevier B.V.
dc.description.sponsorship Consejo Nacional de Ciencia, Tecnología e Innovación Tecnológica - Concytec
dc.identifier.doi https://doi.org/10.1016/j.apsusc.2020.147864
dc.identifier.scopus 2-s2.0-85091122728
dc.identifier.uri https://hdl.handle.net/20.500.12390/2403
dc.language.iso eng
dc.publisher Elsevier B.V.
dc.relation.ispartof Applied Surface Science
dc.rights info:eu-repo/semantics/openAccess
dc.subject Ti3AlC2
dc.subject MAX-phase formation es_PE
dc.subject Multilayer es_PE
dc.subject Rapid thermal processing of thin films es_PE
dc.subject Ti2AlC es_PE
dc.subject.ocde http://purl.org/pe-repo/ocde/ford#2.11.02
dc.title Development of the phase composition and the properties of Ti2AlC and Ti3AlC2 MAX-phase thin films – A multilayer approach towards high phase purity
dc.type info:eu-repo/semantics/article
dspace.entity.type Publication
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