Publicación:
Capacitance voltage curve simulations for different passivation parameters of dielectric layers on silicon

dc.contributor.author Sevillano-Bendezu, M. A. es_PE
dc.contributor.author Dulanto, J. A. es_PE
dc.contributor.author Conde, L. A. es_PE
dc.contributor.author Grieseler, R. es_PE
dc.contributor.author Guerra, J. A. es_PE
dc.contributor.author Tofflinger, J. A. es_PE
dc.date.accessioned 2024-05-30T23:13:38Z
dc.date.available 2024-05-30T23:13:38Z
dc.date.issued 2020
dc.description.abstract Surface passivation is a widely used technique to reduce the recombination losses at the semiconductor surface. The passivating layer performance can be mainly characterized by two parameters: The fixed charge density (Q(ox)) and the interface trap density (D-it) which can be extracted from Capacitance-Voltage measurements (CV). In this paper, simulations of High-Frequency Capacitance-Voltage (HF-CV) curves were developed using simulated passivation parameters in order to examine the reliability of measured results. The D-it was modelled by two different sets of functions: First, the sum of Gaussian functions representing different dangling bond types and exponential tails for strained bonds. Second, a simpler U-shape model represented by the sum of exponential tails and a constant value function was employed. These simulations were validated using experimental measurements of a reference sample based on silicon dioxide on crystalline silicon (SiO2/c-Si). Additionally, a fitting process of HF-CV curves was proposed using the simple U-shape D-it model. A relative error of less than 0.4% was found comparing the average values between the approximated and the experimentally extracted D-it's. The constant function of the approximated D-it represents an average of the experimentally extracted D-it for values around the midgap energy where the recombination efficiency is highest.
dc.description.sponsorship Consejo Nacional de Ciencia, Tecnología e Innovación Tecnológica - Concytec
dc.identifier.doi https://doi.org/10.1088/1742-6596/1433/1/012007
dc.identifier.uri https://hdl.handle.net/20.500.12390/2815
dc.language.iso eng
dc.publisher IOP Publishing
dc.relation.ispartof PERUVIAN WORKSHOP ON SOLAR ENERGY (JOPES 2019)
dc.rights info:eu-repo/semantics/openAccess
dc.subject General Physics and Astronomy
dc.subject.ocde http://purl.org/pe-repo/ocde/ford#1.03.03
dc.title Capacitance voltage curve simulations for different passivation parameters of dielectric layers on silicon
dc.type info:eu-repo/semantics/article
dspace.entity.type Publication
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