Publicación:
Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering

Página de artículo simple
dc.contributor.author Calderon, NZ es_PE
dc.contributor.author Ampuero, JL es_PE
dc.contributor.author La Rosa-Toro, A es_PE
dc.contributor.author Pujada, BR es_PE
dc.date.accessioned 2024-05-30T23:13:38Z
dc.date.available 2024-05-30T23:13:38Z
dc.date.issued 2018
dc.description Calderon would like to express her thanks to the Fondecyt project number 167-2015 (Concytec, Perú). Pujada express his thanks to the project number FC-F-3-2017, Vicerrectorado de Investigación (UNIPerú), and also to the Universidad de Chile and the Fondecyt Project 1110148 (Conicyt, Chile).
dc.description.abstract Silver-carbon films (Ag-C), rich in silver, deposited by DC magnetron sputtering from a silver target (Ag) into silicon substrate (100) in atmosphere of argon/acetylene plasma, have been studied in function of the substrate temperature (as-deposited, 200°C and 300°C). The Ag-C films were obtained using an acetylene gas flow of 0.3 sccm and dc cathode current of 180mA. Ag-C films were characterized by X-ray diffraction, Raman spectroscopy and scanning electron microscopy. It has been observed the decrease of graphite-like bonds in the Ag-C films with the substrate temperature. The SEM revealed that the substrate temperature promotes changes on the surface morphology. These changes on the chemistry and surface morphology are discussed in terms of atoms diffusion on the surface and the chemical composition of the Ag-C films.
dc.description.sponsorship Consejo Nacional de Ciencia, Tecnología e Innovación Tecnológica - Concytec
dc.identifier.doi https://doi.org/10.1088/1742-6596/1143/1/012027
dc.identifier.isi 467431100027
dc.identifier.uri https://hdl.handle.net/20.500.12390/1091
dc.language.iso eng
dc.publisher IOP
dc.rights info:eu-repo/semantics/openAccess
dc.rights.uri https://creativecommons.org/licenses/by/3.0/
dc.subject substrate temperature
dc.subject Silver-carbon es_PE
dc.subject argon/acetylene plasma es_PE
dc.subject properties of Ag-C films es_PE
dc.subject.ocde https://purl.org/pe-repo/ocde/ford#1.03.00
dc.title Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
dc.type info:eu-repo/semantics/conferenceObject
dspace.entity.type Publication
oairecerif.author.affiliation #PLACEHOLDER_PARENT_METADATA_VALUE#
oairecerif.author.affiliation #PLACEHOLDER_PARENT_METADATA_VALUE#
Archivos
Colecciones
1.1 Eventos institucionales
 2.2 Estudios de maestría