Publicación:
Producción y caracterización de multicapas de alta dureza basadas en nitruro de titanio por técnica DC Magnetrón Sputtering
Producción y caracterización de multicapas de alta dureza basadas en nitruro de titanio por técnica DC Magnetrón Sputtering
No hay miniatura disponible
Fecha
2016
Autores
Asencios Rojas, Junior David
Título de la revista
Revista ISSN
Título del volumen
Editor
Universidad Nacional de Ingeniería
Proyectos de investigación
Unidades organizativas
Número de la revista
Abstracto
In this thesis we explore the possibilities to obtain hardness enhancement in three different types of multilayer system: TiN/AlN, TiN/NbN and TiN/TaN, produced by bias-dc magnetron sputtering under the same deposition conditions. Multilayer structure and chemical composition were confirmed by GDOES (Glow discharge optical emission spectroscopy). Complementary chemical analyses were also carried out by AES and EDS. Crystalline structure of component layers was studied by XRD (X-ray diffraction). Microhardness was measured by using a classic Vickers microdurometer and SEM (Scanning electron microscopy), as well as, by nanoindentation. Corrosion current was determined by Tafel extrapolation metho
Descripción
Palabras clave
Técnica DC Magnetrón Sputtering,
Caracterización de multicapas